Prime Wafer

Prime Wafer Polishing Slurries

Nalco Water has supplied colloidal silica to the wafer industry for decades, and our comprehensive and wide-ranging expertise allow us to produce some of the highest quality silicon polishing slurries in the industry. 

Our highly stable colloidal silica products offer exceptional purity, controlled particle size, distribution, and morphology for optimum performance in your prime wafer polishing processes.

Contact Us


Designing Wafer Polishing Slurries For:

Shield with checkmark

High removal rates

 

Gears with arrows

Steady performance

 

Arrow pointed down in circle.

Low defectivity

 

Disinfection Icon
Excellent surface finish and planarity


Ready-to-use Colloidal Silica Slurries for Silicon Wafer Polishing

  • Size (nm): 60 
  • pH: 11 
  • Stabilizing: Na+

  • Size (nm): 60 
  • pH: 8.5 
  • Stabilizing: Na+

  • Size (nm): 85 
  • pH: 11-12 
  • Stabilizing: NH4 
  • Notes: Chelating additive

  • Size (nm): 85 
  • pH: 11-12 
  • Stabilizing: NH4 
  • Notes: High Si removal rate. Hazardous.

  • Size (nm): 120
  • Area m2/gm: 25
  • % Solids: 47
  • pH: 9-10
  • Stabilizing: K+

Chemical Mechanical Planarization

Addressing Multiple Polishing Applications

Our colloidal silica-based polishing slurries are widely used for the stock polish, edge polish and final polish steps in the manufacture of silicon wafers and other semiconductor substrates for microchips.

These slurries are also used in the precision surface finishing of optics, watch crystals and other glass components.

nanoparticlesforpolishing

Innovating for the Needs of CMP Slurry Formulators

Nalco Water has aligned our colloidal silica manufacturing capabilities to deliver high-purity, innovative nanoparticles to meet the needs of the CMP slurry formulator.

  • Ultra-high purity waterglass-based nanoparticles
  • Broad range of particle sizes, size distributions, and concentrations
  • Engineered products designed to be stable across a broad pH range
  • Strong research-to-research collaboration
Core Technologies_550x310.jpg

Nalco Water is a Colloidal Silica Leader

  • First patented colloidal silica manufacturing process in 1941
  • One of the largest colloidal silica manufacturers globally
  • Innovative RD&E teams for customized product development
  • Products designed for manufacturing efficiency, quality, and control
  • Delivering high value through innovative particle design and quality support

Contact Our Colloidal Technologies Experts

Let us know how we can help.

* indicates required field

By checking "Yes," you are agreeing that Ecolab may contact you via email with promotional offers, updates, and other information. If you wish to continue your customer relationship without receiving marketing communication, you may submit your information without checking this box.

Data Privacy Concerns? See our Privacy Policy.

References

  1. Products were made using LMSII engineered approach to remove metals; [Cu] and [Ni] less than 20 ppb. Availability subject to the volume.↵